Polymethyl Methacrylate (PMMA) Pyrolysis Assisted Transfer of 2D Materials for Large-Scale Molybdenum Disulfide Nems Resonator Arrays-Reference-Cited by-同舟云学术

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Polymethyl Methacrylate (PMMA) Pyrolysis Assisted Transfer of 2D Materials for Large-Scale Molybdenum Disulfide Nems Resonator Arrays

Published:2024-01-21 Issue: Volume:10 Page:677-680
ISSN:
Container-title:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Liu Zuheng¹,Wei Jianyong¹,Zhang Pengcheng¹,Jia Yueyang¹,Chen Ying²,Jia Hao²,Wang Zenghui³,Yang Rui¹

Affiliation:

1. Shanghai Jiao Tong University,University of Michigan – Shanghai Jiao Tong University Joint Institute,Shanghai,China,200240

2. Chinese Academy of Sciences,Shanghai Institute of Microsystem and Information Technology,Shanghai,China,200050

3. University of Electronic Science and Technology of China,Institute of Fundamental and Frontier Sciences,Chengdu,China,610054

Funder

National Natural Science Foundation of China

Science and Technology Commission of Shanghai Municipality

Natural Science Foundation of Chongqing

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439327.pdf?arnumber=10439327

Reference11 articles.

1. Graphene mechanical oscillators with tunable frequency

2. Nanomechanical Resonators: Toward Atomic Scale

3. Large-Scale Arrays of Single-Layer Graphene Resonators

4. Multilayer MoS2 transistors enabled by a facile dry-transfer technique and thermal annealing

5. Large-Scale Arrays of Tunable Monolayer MoS₂ Nanoelectromechanical Resonators

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