Miniaturized Flow Sensor Based On Thermal Feedback And Digitized Power Distribution
Author:
Affiliation:
1. Shenzhen University,China
2. University of Pennsylvania,USA
Funder
National Natural Science Foundation of China
Natural Science Foundation of Guangdong Province
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439422.pdf?arnumber=10439422
Reference14 articles.
1. Perspectives on MEMS, past and future: the tortuous pathway from bright ideas to real products
2. Micromachined flow sensors—a review
3. Highly Sensitive 2D Thermoresistive Micro Calorimetric Flow Sensor by Using $0.35\boldsymbol{\mu}\mathbf{m}$ CMOS MEMS Technology
4. CMOS Compatible MEMS Air Velocity Sensor With Improved Sensitivity and Linearity for Human Thermal Comfort Sensing Applications
5. A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With $\pm$6 m/s Linear Range
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