AlN Self-Rolled-Up Microtube Resonators with Multimode Resonances for On-Chip Optomechanical Sensing-Reference-Cited by-同舟云学术

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AlN Self-Rolled-Up Microtube Resonators with Multimode Resonances for On-Chip Optomechanical Sensing

Published:2024-01-21 Issue: Volume:21 Page:190-193
ISSN:
Container-title:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Liu Yuncong¹,Khandelwal Apratim²,Ren Zhongjie³,Wang Allen³,Li Xiuling³,Feng Philip X.-L.¹

Affiliation:

1. University of Florida,Electrical & Computer Engineering,Gainesville,FL,USA,32611

2. University of Illinois Urbana-Champaign,Electrical & Computer Engineering,Urbana,IL,USA,61801

3. University of Texas at Austin,Electrical & Computer Engineering,Austin,TX,USA,78758

Funder

National Science Foundation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439344.pdf?arnumber=10439344

Reference14 articles.

1. Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology

2. Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films

3. Vertical optical ring resonators fully integrated with nanophotonic waveguides on silicon-on-insulator substrates

4. Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

5. Three-dimensional chemical sensors based on rolled-up hybrid nanomembranes

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