Stability of a micromechanical pull-voltage reference-Reference-Cited by-同舟云学术

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Stability of a micromechanical pull-voltage reference

Published:2003-04 Issue:2 Volume:52 Page:457-460
ISSN:0018-9456
Container-title:IEEE Transactions on Instrumentation and Measurement
language:en
Short-container-title:IEEE Trans. Instrum. Meas.

Author:

Rocha L.A.,Cretu E.,Wolffenbuttel R.F.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx5/19/27069/01202073.pdf?arnumber=1202073

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From −60 °C to 400 °C;Journal of Microelectromechanical Systems;2015-12

2. DC Voltage Reference Based on a Square-Wave-Actuated Microelectromechanical Sensor;IEEE Transactions on Instrumentation and Measurement;2011-07

3. Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage;Microsystem Technologies;2011-02-18

4. Electrical stability of a MEMS-based AC voltage reference;Sensors and Actuators A: Physical;2007-06

5. Self-affine roughness influence on the pull-in voltage in capacitive electromechanical devices;Journal of Applied Physics;2005-08

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