High Performance SAW Resonators Using LiTaO<sub>3</sub>/SiO<sub>2</sub>/4H-SiC Multilayer Substrate-Reference-Cited by-同舟云学术

High Performance SAW Resonators Using LiTaO₃/SiO₂/4H-SiC Multilayer Substrate

Author:

Li Ming¹^ORCID,Xia Xin¹,Li Kunpeng¹,Wu Shuxian²^ORCID,Zou Jie²^ORCID,Chen Kunfeng¹,Tang Gongbin¹

Affiliation:

1. Institute of Novel Semiconductors, ShanDong University, ShanDong, China

2. Key Laboratory for Information Science of Electromagnetic Waves, School of Information Science and Technology, Fudan University, Shanghai, China

Funder

Natural Science Foundation of Shandong Province

Shandong Institutes of Industrial Technology

QiLu Young Scholars Program of Shandong University

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

Reference27 articles.

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