A Sc<sub>0.2</sub>Al<sub>0.8</sub>N-based 14 GHz Film Bulk Acoustic Resonator with over 8% Coupling Coefficient and over 400 Quality factor for Ku-band applications-Reference-Cited by-同舟云学术

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A Sc_0.2Al_0.8N-based 14 GHz Film Bulk Acoustic Resonator with over 8% Coupling Coefficient and over 400 Quality factor for Ku-band applications

Published:2023-09-03 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE International Ultrasonics Symposium (IUS)
language:
Short-container-title:

Author:

Liu Chen¹,Wang Xinghua¹,Yang Wenjia¹,Zhang Ying¹,Woo Eugene Yi Zhun¹,Zhu Yao¹

Affiliation:

1. Agency for Science, Technology and Research (A*STAR),Institute of Microelectronics,Singapore

Funder

Science and Engineering Research Council

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10306337/10306342/10306371.pdf?arnumber=10306371

Reference13 articles.

1. Micro-to-Nanoscale ScAlN Lamb Wave Resonators; Frequency scaling towards the mmWave Spectrum;giribaldi;the 22nd International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2023),0

2. An 18 GHz AlScN Film Bulk Acoustic Wave Resonator with Epitaxial Metal Electrodes;park;the 22nd International Conference on Solid-State Sensors Actuators and Microsystems (Transducers 2023),0

3. Characteristics of an AlN-based bulk acoustic wave resonator in the super high frequency range

4. Super-High-Frequency Band Filters Configured with Air-Gap-Type Thin-Film Bulk Acoustic Resonators

5. A High Coupling Coefficient 2.3-GHz AlN Resonator for High Band LTE Filtering Application

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Acoustic Filters for RF Communication;IEEE Nanotechnology Magazine;2024-02

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