Performance Analysis of Wideband PMUTs: a Comparative Study Between Sol-Gel PZT, PVD PZT, and 15% ScAlN-Based Arrays Through Experimental Evaluation-Reference-Cited by-同舟云学术

Performance Analysis of Wideband PMUTs: a Comparative Study Between Sol-Gel PZT, PVD PZT, and 15% ScAlN-Based Arrays Through Experimental Evaluation

Published:2023-09-03 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE International Ultrasonics Symposium (IUS)
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Author:

Savoia Alessandro S.¹,Giusti Domenico²,Prelini Carlo²,Chang Peter³,Leotti Alberto⁴,Lee Joshua³,Koh Yul³,Ferrera Marco²

Affiliation:

1. Roma Tre University,Dept. of Industrial, Electronic, and Mechanical Engineering,Rome,Italy

2. STMicroelectronics,Agrate Brianza (MB),Italy

3. Agency for Science, Technology and Research (A*STAR),Institute of Microelectronics,Singapore

4. STMicroelectronics,Singapore

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10306337/10306342/10307094.pdf?arnumber=10307094

Reference5 articles.

1. Design, Fabrication, Characterization, and System Integration of a 1-D PMUT Array for Medical Ultrasound Imaging

2. Ultrasound Transmission Through the Back Cavities of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Arrays

3. Accurate evaluation of the electro-mechanical and parasitic parameters of CMUTs through electrical impedance characterization;savoia;Proceedings IEEE International Ultrasonics Symposium,2017

4. Improving PMUT Receive Sensitivity via DC Bias and Piezoelectric Composition;cheng;SENSORS,2022

5. Design, Fabrication, and Characterization of Scandium Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducers

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1. PMUT-Based System for Continuous Monitoring of Bolted Joints Preload;Sensors;2024-06-26

2. Impact of Resonance Frequency Spread on Beam Pattern of a Piezoelectric Micromachined Ultrasonic Transducer Array;2024 13th International Conference on Modern Circuits and Systems Technologies (MOCAST);2024-06-26

3. Fully Integrated Pitch-Matched AlScN PMUT-on-CMOS Array for High- Resolution Ultrasound Images;IEEE Sensors Journal;2024-05-15