Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Strategy and Management,Education
Cited by
4 articles.
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1. Laser system for measuring MEMS relief created by the method of deep reactive ion etching;21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics;2018-12-18
2. Silicon-Based Frequency References;Electrothermal Frequency References in Standard CMOS;2013
3. Consumable Approaches of Polysilicon MEMS CMP;Transactions on Electrical and Electronic Materials;2006-08-01
4. Active vibration isolation of a micro-manufacturing platform based on a neural network;Journal of Materials Processing Technology;2002-10