1. Key Laboratory of Optoelectronic Technology and Systems Education Ministry of China, and the College of Optoelectronic Engineering, Chongqing University, Chongqing, China
2. LAB 2020, Chongqing Pingchuang Institute of Semiconductors Company Ltd, Chongqing, China
3. Delft Institute of Microsystems and Nanoelectronics, Delft University of Technology, Delft, CD, The Netherlands