Electromigration Performance Improvement of Metal Heaters for Si Photonic Ring Modulators-Reference-Cited by-同舟云学术

Electromigration Performance Improvement of Metal Heaters for Si Photonic Ring Modulators

Published:2022-09 Issue:3 Volume:22 Page:417-423
ISSN:1530-4388
Container-title:IEEE Transactions on Device and Materials Reliability
language:
Short-container-title:IEEE Trans. Device Mater. Relib.

Author:

Coenen David¹^ORCID,Croes Kristof²^ORCID,Tsiara Artemisia²^ORCID,Oprins Herman²^ORCID,Simons Veerle²,Pedreira Olalla Varela²,Ban Yoojin³,Van Campenhout Joris³^ORCID,De Wolf Ingrid¹^ORCID

Affiliation:

1. Department of Materials Engineering, KU Leuven, Leuven, Belgium

2. Advanced Reliability, Robustness and Test, imec, Leuven, Belgium

3. 3D and Silicon Photonics, imec, Leuven, Belgium

Funder

imec’s Industry Affiliation R&D Program “Optical I/O.”

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Safety, Risk, Reliability and Quality,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/7298/9876000/09812749.pdf?arnumber=9812749

Reference15 articles.

1. CMOS-compatible Tungsten heaters for silicon photonic waveguides

2. Comparison of heater architectures for thermal control of silicon photonic circuits

3. Integration, processing and performance of low power thermally tunable CMOS-SOI WDM resonators

4. Electromigration path in Cu thin-film lines

5. SciPy 1.0: fundamental algorithms for scientific computing in Python

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1. De-Coupling Thermo-Migration from Electromigration Using a Dedicated Test Structure;2024 IEEE International Reliability Physics Symposium (IRPS);2024-04-14

2. Reliability testing for silicon photonics and optoelectronics (Invited);2024 IEEE International Reliability Physics Symposium (IRPS);2024-04-14

3. Thermal modeling of hybrid three-dimensional integrated, ring-based silicon photonic–electronic transceivers;Journal of Optical Microsystems;2023-12-06

4. Electro-Absorption Modulator Thermo-Optical Self-Heating Analysis;Journal of Lightwave Technology;2023-09-15