A Novel CMOS-SOI High-Responsivity Thermopile for Thermal Sensing Applications
Author:
Affiliation:
1. University of Pavia,Computer and Biomedical Engineering,Dept. of Electrical,Pavia,Italy
2. STMicroelectronics,Catania,Italy
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9937201/9937203/09937944.pdf?arnumber=9937944
Reference13 articles.
1. Study on a High Performance MEMS Infrared Thermopile Detector
2. A Front-Side Microfabricated Tiny-Size Thermopile Infrared Detector With High Sensitivity and Fast Response
3. Improved Thermopile on Pyramidally-Textured Dielectric Film
4. An Integrated Thermopile-Based Sensor with a Chopper-Stabilized Interface Circuit for Presence Detection
5. An Integrated Micromachined Thermopile Sensor With a Chopper Interface Circuit for Contact-Less Temperature Measurements
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1. Reference Temperature Sensor for TMOS-Based Thermal Detectors;IEEE Access;2023
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