System-Level Modeling and Design of a Temperature Compensated CMOS MEMS Thermal Flow Sensor
Author:
Affiliation:
1. Shenzhen University,College of Electronics and Information Engineering,Shenzhen,China
2. Hamad Bin Khalifa University,College of Science and Engineering,Doha,Qatar
Funder
National Natural Science Foundation of China
Natural Science Foundation of Guangdong Province
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9937201/9937203/09937487.pdf?arnumber=9937487
Reference16 articles.
1. Bidirectional CMOS-MEMS Airflow Sensor with sub-mW Power Consumption and High Sensitivity;xu;IEEE Transactions on Industrial Electronics,2021
2. Thermophysical and transport properties of humid air at temperature range between 0 and 100°C
3. Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit
4. A single chip, double channel thermal flow meter
5. Fabrication of a Micromachined Two-Dimensional Wind Sensor by Au–Au Wafer Bonding Technology
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1. System-Level Optimization of MEMS Thermal Wind Sensor Based on the Co-Simulation of Macromodel and Board-Level Interface Circuits;Journal of Microelectromechanical Systems;2023-12
2. A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With $\pm$6 m/s Linear Range;IEEE Journal of Solid-State Circuits;2023
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