Comparison of experimental target currents with analytical model results for plasma immersion ion implantation-Reference-Cited by-同舟云学术

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Comparison of experimental target currents with analytical model results for plasma immersion ion implantation

Published:1995-06 Issue:3 Volume:23 Page:415-421
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

En W.G.,Lieberman M.A.,Cheung N.W.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx1/27/9063/00402334.pdf?arnumber=402334

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3. Transformation of Enhanced Glow Discharge Dynamics in Nitrogen Plasma Immersion Ion Implantation;IEEE Transactions on Plasma Science;2013-03

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