Corrections to “Multifunction Thermopile Sensors Fabricated With a MEMS-Compatible Process” [May 13 242-247]
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Published:2013-08
Issue:3
Volume:26
Page:430-430
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ISSN:0894-6507
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Container-title:IEEE Transactions on Semiconductor Manufacturing
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language:
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Short-container-title:IEEE Trans. Semicond. Manufact.
Author:
Sin Li-min,Pan Tai-Tou,Tsai Chun-Wei,Chou Chia-feng,Hong Jia-qi,Tsai Jui-che
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials