Study on the Load Model of Microwave Power Detection Chip Based on MEMS Fixed Beams-Reference-Cited by-同舟云学术

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Study on the Load Model of Microwave Power Detection Chip Based on MEMS Fixed Beams

Published:2024-08 Issue:8 Volume:71 Page:4952-4959
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Liang Yuxiang¹,Sun Haoyu¹,Zhu Siyu¹,Wang Debo¹^ORCID

Affiliation:

1. College of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, China

Funder

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Postgraduate Research and Practice Innovation Program of Jiangsu Province

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/16/10609410/10574218.pdf?arnumber=10574218

Reference28 articles.

1. Optimization design of micro eddy current conductivity measurement sensor;Zhao;J. Electron. Meas. Instrum.,2015

2. Displacement/distance measurement technology based on microwave radar;Chen;J. Electron. Meas. Instrum.,2015

3. Research on thermo-electric MEMS microwave power sensor model;Zhang;J. Instrum. Instrum.,2018

4. System-level modeling of MEMS microwave power sensor;Sun;Electron. Compon.,2021

5. Research on coupled MEMS microwave power sensor;Jin;J. Instrum. Instrum.,2022

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