2D Scalar Wave Model for Fast Analysis of Apodized BAW Devices
Author:
Affiliation:
1. School of Electronic Science and Engineering University of Electronic Science and Technology of China,Chengdu,People's Republic of China,611731
2. Graduate School of Engineering Chiba University,Chiba,Japan,263-8522
Funder
National Natural Science Foundation of China
China Academy of Engineering Physics
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9957114/9957143/09958594.pdf?arnumber=9958594
Reference25 articles.
1. Optimization of frame-like film bulk acoustic resonators for suppression of spurious lateral modes using finite element method;lee;Proc IEEE Ultrason Symp,2004
2. Effect of shapes and electrode material on figure of merit (FOM) of BAW resonator
3. Suppression of spurious modes in mirror-type thin film BAW resonators using an appropriate shape of the active area
4. Finite element simulations of thin-film composite BAW resonators
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