The effect of frequency on the lifetime of a surface micromachined microengine driving a load-Reference-Cited by-同舟云学术

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The effect of frequency on the lifetime of a surface micromachined microengine driving a load

Published:1998 Issue: Volume: Page:
ISSN:
Container-title:1998 IEEE International Reliability Physics Symposium Proceedings 36th Annual (Cat No 98CH36173) RELPHY-98
language:
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Author:

Tanner D.M.,Miller W.M.,Eaton W.P.,Irwin L.W.,Peterson K.A.,Dugger M.T.,Senft D.C.,Smith N.F.,Tangyunyong P.,Miller S.L.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx4/5459/14724/00670438.pdf?arnumber=670438

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