A Comprehensive Study on the Fabrication of a Three-Dimensional SiC Trench MOSFET with N-P-N Sandwich Epitaxial Layers
Author:
Affiliation:
1. School of Electrical and Electronic Engineering, Huazhong University of Science and Technology,Wuhan,China
2. Hubei Jiufengshan Laboratory,Dept of Integrated Power Systems and Device Technology,Wuhan,China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10488911/10488919/10489037.pdf?arnumber=10489037
Reference12 articles.
1. Fundamentals of Power Semiconductor Devices
2. Material science and device physics in SiC technology for high-voltage power devices
3. 4H-SiC Tapered-Gate MOSFET with Low ON-resistance and Hight Current Density
4. Characterization and Implementation of Dual-SiC MOSFET Modules for Future Use in Traction Converters
5. Review of Silicon Carbide Power Devices and Their Applications
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