From Ceramic Tube to Microcantilever: A New Strategy for Low Power, Fast Heating and High Integrated Metal Oxide Semiconductor Gas Sensor-Reference-Cited by-同舟云学术

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From Ceramic Tube to Microcantilever: A New Strategy for Low Power, Fast Heating and High Integrated Metal Oxide Semiconductor Gas Sensor

Published:2020-07-13 Issue: Volume: Page:
ISSN:
Container-title:2020 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
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Author:

Xie Dongcheng,Liu Ruichen,Yang Yujie,Xue Feng,Wang Peng,Wang Wenjing,Chen Dongliang,Wu Feng,Xu Lei

Funder

National Natural Science Foundation of China

Chinese Academy of Sciences

Fundamental Research Funds for the Central Universities

Research and Development

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9307826/9307829/09307895.pdf?arnumber=9307895

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