Porous Silicon Formation by Stain Etching on Pyramid Surface in U-Shape MSM Photodetector-Reference-Cited by-同舟云学术

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Porous Silicon Formation by Stain Etching on Pyramid Surface in U-Shape MSM Photodetector

Published:2024-05-01 Issue: Volume:2 Page:69-72
ISSN:
Container-title:2024 10th International Conference on Engineering, Applied Sciences, and Technology (ICEAST)
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Author:

Muanghlua Rangson¹,Atiwongsangthong Narin¹,Vijafun Jidapa¹,Suttijalern Kamonwan¹,Niemcharoen Surasak¹,Buakaew Seangrawee¹

Affiliation:

1. King Mongkut’s Institute of Technology,School of Engineering,Department of Electronics Engineering,Ladkrabang,Bangkok,Thailand

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10553375/10553651/10554022.pdf?arnumber=10554022

Reference11 articles.

1. Metal and Semiconductor Contacts;Surasak,2013

2. Increasing photodiode photocurrent on Al/n-Si/Al UMSM that Froming by Random Pyramid;Yutthana,2017

3. Study of UMSM Photodetector Fabrication Technique by Silicic Acid Added in TMAH Solution;Prabket

4. Integrated Circuit Technology;Surasak,2020

5. Handbook of Porous Silicon

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