1. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University,Katahira,Sendai,Japan,980-8577
2. Komatsu University,Faculty of Production Systems Engineering and Sciences,Ishikawa,Japan,923-8511
3. Ibaraki University,Graduate School of Science and Engineering,Hitachi,Ibaraki,Japan,316-8511
4. Development Depart. Tohoku Steel Co., Ltd.,Murata,Miyagi,Japan
5. Tohoku University,Micro System Integration Center,Sendai,Japan,980-8577