Investigating the Impact of Probe Geometry Characteristics on the Ra in the International Metrology Comparison of Surface Roughness-Reference-Cited by-同舟云学术

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Investigating the Impact of Probe Geometry Characteristics on the Ra in the International Metrology Comparison of Surface Roughness

Published:2023-10-20 Issue: Volume: Page:100-104
ISSN:
Container-title:2023 2nd International Conference on Optical Imaging and Measurement (ICOIM)
language:
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Author:

Wang Kang¹,Zhang Shu¹,Pi Lei¹,Shi Zhoumiao²,Zhang Shihan¹,Yu Xixi³,Shi Yushu¹

Affiliation:

1. National Institute of Metrology, China,Division of Center for Advanced Measurement Science,Beijing,China

2. NIM Shenzhen,Shenzhen Institute Technology Innovation,China

3. Zhejianglab,Research Center for Intelligent Technology Standardization,Hangzhou,China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10491280/10491414/10491417.pdf?arnumber=10491417

Reference10 articles.

1. Final report on APMP.L-K8: International comparison of surface roughness

2. Experimental Investigation of Surface Roughness Characteristics Ra, Rq and Rz

3. Correction of the tip convolution effects in the imaging of nanostructures studied through scanning force microscopy

4. Developments in Australia's surface roughness measurement system

5. Accurate tip characterization in critical dimension atomic force microscopy

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