Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage-Reference-Cited by-同舟云学术

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Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage

Published:2014-01 Issue:1 Volume:22 Page:102-118
ISSN:1063-6536
Container-title:IEEE Transactions on Control Systems Technology
language:
Short-container-title:IEEE Trans. Contr. Syst. Technol.

Author:

Oomen Tom,van Herpen Robbert,Quist Sander,van de Wal Marc,Bosgra Okko,Steinbuch Maarten

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Control and Systems Engineering

Link

http://xplorestaging.ieee.org/ielx7/87/6687265/06475173.pdf?arnumber=6475173

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