High performance NEMS resonant infrared detector based on an aluminum nitride nano-plate resonator
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Published:2013-06
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Container-title:2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
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Author:
Hui Y.,Rinaldi M.
Cited by
18 articles.
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