Analysis of Internal Atmosphere of InGaAs Detectors with Different Degassing Conditions

Author:

Lai Canxiong1,Sun Wen2,Yang Shaohua1,Zhou Bin1

Affiliation:

1. Science and Technology on Reliability Physics and Application of Electronic Component Laboratory CEPREI,Guangzhou,China

2. Key Laboratory of Infrared Imaging Materials and Detectors Shanghai Institute of Technical Physics,Shanghai,China

Publisher

IEEE

Reference14 articles.

1. Developments of high performance short-wave infrared InGaAs focal plane detectors;gong;Infrared Technology,2016

2. Test and control technology of tesidual gas content in electronic components;niu;Semiconductor technology,2011

3. Study on method for internal atmosphere content test of 0. 01cc small cavity hermetic device;zhou;China Mesurement & Test,2018

4. MEMS packaging reliability assessment: Residual Gas Analysis of gaseous species trapped inside MEMS cavities

5. High reliability packaging technology of InGaAs near IR detector;liu;Infrared and Laser Engineering,2011

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