Spectral Performance of a Micromachined Infrared Spectrum Analyzer in Silicon-Reference-Cited by-同舟云学术

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Spectral Performance of a Micromachined Infrared Spectrum Analyzer in Silicon

Published:2005-02 Issue:1 Volume:54 Page:264-267
ISSN:0018-9456
Container-title:IEEE Transactions on Instrumentation and Measurement
language:en
Short-container-title:IEEE Trans. Instrum. Meas.

Author:

Kong S.H.,Wolffenbuttel R.F.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx5/19/30128/01381824.pdf?arnumber=1381824

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Tunable Fabry-Perot Interferometer Designed for Far-Infrared Wavelength by Utilizing Electromagnetic Force;Sensors;2018-08-06

2. A Fabry–Perot interferometer-based long-wavelength infrared spectrometer utilizing a novel PDMS patterning technique;Japanese Journal of Applied Physics;2015-05-18

3. CMOS Compatible Midinfrared Wavelength-Selective Thermopile for High Temperature Applications;Journal of Microelectromechanical Systems;2015-02

4. Development of a thermopile infrared sensor using stacked double polycrystalline silicon layers based on the CMOS process;Journal of Micromechanics and Microengineering;2013-05-13

5. A review of visible-range Fabry–Perot microspectrometers in silicon for the industry;Optics & Laser Technology;2012-10

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