Optimized Design and Process for Making a DC Voltage Reference Based on MEMS

Author:

Karkkainen A.,Awan S.A.,Kyynarainen J.,Pekko P.,Oja A.S.,Seppa H.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Electrostatic and RF-properties of MEMS structures;Handbook of Silicon Based MEMS Materials and Technologies;2020

2. Design and Optimization of a Low‐Noise Voltage Reference Using Chopper Stabilization Technique;Chinese Journal of Electronics;2017-09

3. Electrostatic and RF-Properties of MEMS Structures;Handbook of Silicon Based MEMS Materials and Technologies;2015

4. Resonant frequency characterization of MEMS based energy harvesters by harmonic sampling analysis method;Measurement;2014-06

5. DC Voltage Reference Based on a Square-Wave-Actuated Microelectromechanical Sensor;IEEE Transactions on Instrumentation and Measurement;2011-07

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