Design and FEM Analysis of Navigation Grade Low Noise and High Sensitivity Capacitive MEMS Accelerometer based on SOIMUMPs Process Constraints-Reference-Cited by-同舟云学术

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Design and FEM Analysis of Navigation Grade Low Noise and High Sensitivity Capacitive MEMS Accelerometer based on SOIMUMPs Process Constraints

Published:2020-11-05 Issue: Volume: Page:
ISSN:
Container-title:2020 IEEE 23rd International Multitopic Conference (INMIC)
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Author:

Saghir Shayaan,Saleem Muhammad Mubasher

Funder

Higher Education Commission, Pakistan

TDF

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9318042/9318043/09318068.pdf?arnumber=9318068

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and Analysis of a Low-g MEMS Accelerometer Utilizing Weakly Coupled Resonators;2023 International Conference on Engineering and Emerging Technologies (ICEET);2023-10-27

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