Evolution of SAW and BAW Devices Using Thin LiTaO3 and LiNbO3
Author:
Affiliation:
1. Tohoku University,Department of Robotics and Microsystem Integration Center,Sendai,Japan
2. Tohoku University,Department of Robotics,Sendai,Japan
Funder
Ministry of Internal Affairs and Communications
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10538478/10538479/10538491.pdf?arnumber=10538491
Reference15 articles.
1. Large Qxf product for HBAR using Smart Cut ™ transfer of LiNbO3 thin layers onto LiNbO3 substrate
2. High-Performance SAW Resonator on New Multilayered Substrate Using LiTaO3Crystal
3. High frequency resonators with wide bandwidth using SH0 mode plate wave in thin LiNbO3
4. Surface Acoustic Wave Resonators With Hetero Acoustic Layer (HAL) Structure Using Lithium Tantalate and Quartz
5. Low temperature bonding for 3D integration — A review of the surface activated bonding (SAB)
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