Fabrication of Slanted Grating Utilizing Reaction Ion Beam Etching: The Role of CHF<sub>3</sub> and O<sub>2</sub> Etching Atmosphere-Reference-Cited by-同舟云学术

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Fabrication of Slanted Grating Utilizing Reaction Ion Beam Etching: The Role of CHF₃ and O₂ Etching Atmosphere

Published:2022-10-25 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)
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Author:

Liu Na¹,Ding Guojian²,Mo Guankong²,Shi Jia¹,Feng Qi²,Yu Ping²,Wang Xiaohui²,Xu Wenjun²,Zhang Yikai¹,Niu Pingjuan¹,Wang Yang²,Jia Haiqiang³,Chen Hong³

Affiliation:

1. Tiangong University,School of Electronic and Information Engineering,Tianjin,China,300387

2. Songshan Lake Materials Laboratory,Dongguan,China,523808

3. Institute of Physics, Chinese Academy of Sciences,Key Laboratory for Renewable Energy,Beijing,China,100190

Funder

Research and Development

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9962815/9963138/09963283.pdf?arnumber=9963283

Reference8 articles.

1. Optical pulse compression with diffraction gratings

2. Infrared micro-spectrometer based on a diffraction grating

3. Diffraction grating 3D display optimization

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Bottom angle control mechanism and optimization of slanted gratings for optical applications;Journal of Vacuum Science & Technology A;2024-01-16

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