Design and Simulation of a Differential Resonant Pressure Sensor-Reference-Cited by-同舟云学术

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Design and Simulation of a Differential Resonant Pressure Sensor

Published:2023-12-17 Issue: Volume: Page:1-6
ISSN:
Container-title:2023 16th International Conference on Sensing Technology (ICST)
language:
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Author:

Yadav Chinmay¹,Paliwal Sankalp²,Yenuganti Sujan¹,S Srinivasulu Raju²

Affiliation:

1. Birla Institute of Technology and Science Pilani,Department of Electrical and Electronics Engineering,Pilani,Rajasthan,India

2. VR Siddhartha Engineering College,Department of Electronics and Instrumentation Engineering,Vijayawada,Andhra Pradesh,India

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10460767/10460768/10460831.pdf?arnumber=10460831

Reference25 articles.

1. A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap Dielectric

2. Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges

3. CMOS capacitive pressure sensor design and integration with RFID tag for biomedical applications

4. A novel capacitive pressure sensor based on non-coplanar comb electrodes

5. Conception and realization of a novel design for a capacitive pressure sensor with high sensitivity and linear response

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