1. Institute for Physics of Microstructures of RAS, Superconducting Nanoelectronics Laboratory Nizhny Novgorod State Technical University, n.a. R.E. Alekseev,Terahertz spectrometry department,Nizhny Novgorod,Russia
2. Institute for Physics of Microstructures of RAS,Department for technology of nanostructures and devices,Nizhny Novgorod,Russia