Estimating the Modulus and Yield Strength of the Top-Layer Film on Multilayer BEOL Stacks
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Published:2018-09
Issue:3
Volume:18
Page:438-449
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ISSN:1530-4388
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Container-title:IEEE Transactions on Device and Materials Reliability
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language:
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Short-container-title:IEEE Trans. Device Mater. Relib.
Author:
Song Tao,Chen Chun-Pei,Subbarayan Ganesh,Lin Hung-Yun,Gurrum Siva
Funder
Semiconductor Research Corporation
Texas Instruments
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Safety, Risk, Reliability and Quality,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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