Development of Multi-Layer Fabrication Process for SFQ Large Scale Integrated Digital Circuits

Author:

Ying LiliangORCID,Zhang XueORCID,Niu Minghui,Ren JieORCID,Peng WeiORCID,Maezawa Masaaki,Wang Zhen

Funder

Strategic Priority Research Program of Chinese Academy of Sciences

Science and Technology Commission of Shanghai Municipality

Chinese Academy of Sciences

Chinese Academy of Sciences Key Technology Talent Program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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