Noncontact displacement sensing with high bandwidth and subnanometer resolution based on squeeze film damping effect-Reference-Cited by-同舟云学术

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Noncontact displacement sensing with high bandwidth and subnanometer resolution based on squeeze film damping effect

Published:2022-07-25 Issue: Volume: Page:
ISSN:
Container-title:2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
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Author:

Zhai Shenghang¹,Shi Jialin¹,Yu Peng¹,Yang Tie¹,Su Chanmin¹,Liu Lianqing¹

Affiliation:

1. Shenyang Institute of Automation, Chinese Academy of Sciences,The State Key Laboratory of Robotics,Shenyang,China,110016

Funder

National Natural Science Foundation of China

Chinese Academy of Sciences

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9870245/9870246/09870502.pdf?arnumber=9870502

Reference21 articles.

1. New simple optical sensor: From nanometer resolution to centimeter displacement range

2. Precision non-contact displacement sensor based on the near-field characteristics of fiber specklegrams

3. Investigation of a complete squeeze-film damping model for MEMS devices

4. Squeeze film air damping in MEMS

5. Modified Reynolds equation and analytical analysis of squeeze-film air damping of perforated structures

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