Investigation of the Phase Composition and Structural Parameters of Aluminum Nitride Thin Films Obtained by Magnetron Sputtering-Reference-Cited by-同舟云学术

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Investigation of the Phase Composition and Structural Parameters of Aluminum Nitride Thin Films Obtained by Magnetron Sputtering

Published:2023-11-10 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE XVI International Scientific and Technical Conference Actual Problems of Electronic Instrument Engineering (APEIE)
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Author:

Baranova Larisa V.¹,Baisova Bibigul T.¹,Strunin Vladimir I.¹

Affiliation:

1. FGAOU VO "Omsk State University Named After F.M. Dostoevsky",Institute of Radiophysics and Physical Electronics of Omsk Scientific Center,Omsk,Russian Federation

Funder

Russian Science Foundation

Tomsk State University

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10347555/10347542/10347673.pdf?arnumber=10347673

Reference11 articles.

1. Development and research of acoustic resonators with Al/(Al, Sc)N/Mo/”Almaz" structure with high Q-factor on microwave [Razrabotka i issledovanie akusticheskih rezonatorov so strukturoj Al/(Al, Sc) N/Mo/Almaz s vysokoj-dobrotnostyu na svch];Sorokin;Acoustic magazine,2019

2. Thin-film microwave resonator with a Bragg reflector [Tonkoplenochnyj svch-rezonator s brehggovskim otrazhatelem];Tanskaya

3. Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review

4. AlN piezoelectric thin films for energy harvesting and acoustic devices

5. Trends in developments in M URGAMS [Tendencii razvitiya mehms];Reznev,2010

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