Author:
Kalliopuska J. J.,Eranen S.,Virolainen T.,Kamarainen V.,Ji F.,Garcia F.,Orava R.,van Remortel N.,Santala M.
Cited by
2 articles.
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1. A cubic isotropic X-ray dose detector diode fabricated by DRIE of SOI substrates;Sensors and Actuators A: Physical;2014-07
2. 3D processing on 6in. high resistive SOI wafers: Fabrication of edgeless strip and pixel detectors;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2009-08