Silicon Carbide As A Mechanical Material-Reference-Cited by-同舟云学术

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Silicon Carbide As A Mechanical Material

Published: Issue: Volume: Page:
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Container-title:Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
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Author:

Krotz G.,Legner W.,Wapner C.,Moller H.,Sonntag H.,Muller G.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx4/5818/15527/00721776.pdf?arnumber=721776

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-Performance Polarization-Independent Beam Splitters and MZI in Silicon Carbide Integrated Platforms for Single-Photon Manipulation;Journal of Lightwave Technology;2022-12-01

2. Measurement of Human Blood Pressure using MEMS Pressure Sensor;2022 9th International Conference on Computing for Sustainable Global Development (INDIACom);2022-03-23

3. Microneedle Technology: An Insight into Recent Advancements and Future Trends in Drug and Vaccine Delivery;ASSAY and Drug Development Technologies;2021-03-01

4. A polycrystalline SiC-on-Si architecture for capacitive pressure sensing applications beyond 400 °C: Process development and device performance;Journal of Materials Research;2012-08-16

5. Micromachining of SiC;Silicon Carbide;2004

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