Measurement and modelling of surface micromachined, electrostatically actuated microswitches-Reference-Cited by-同舟云学术

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Measurement and modelling of surface micromachined, electrostatically actuated microswitches

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Container-title:Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
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Author:

Majumder S.,McGruer N.E.,Zavracky P.M.,Adams G.G.,Morrison R.H.,Krim J.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx3/4846/13787/00635407.pdf?arnumber=635407

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