Author:
Franz J.,Baumann H.,Trah H.
Cited by
3 articles.
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1. A Piezoelectric Microvalve for Micropropulsion;NanoTech 2002 - "At the Edge of Revolution";2002-09-09
2. Fabrication of biomimetic 3-D structured diaphragms;Sensors and Actuators A: Physical;2002-04
3. A micromachined pressure/flow-sensor;Sensors and Actuators A: Physical;1999-11