Author:
Mastrangelo C.H.,Muller R.S.
Cited by
4 articles.
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1. Light Detectors;Handbook of Modern Sensors;2010
2. Measurement of thermal expansion coefficient of poly-Si using microgauge sensors;Sensors and Actuators A: Physical;1999-06
3. Temperature Measurement;The Measurement, Instrumentation and Sensors Handbook on CD-ROM;1999-02-26
4. Average power control and positioning of polysilicon thermal actuators;Sensors and Actuators A: Physical;1999-01