Self-assembled microactuated XYZ stages for optical scanning and alignment-Reference-Cited by-同舟云学术

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Self-assembled microactuated XYZ stages for optical scanning and alignment

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Container-title:Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
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Author:

Li Fan ,Wu M.C.,Choquette K.D.,Crawford M.H.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx3/4846/13397/00613648.pdf?arnumber=613648

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems;Actuators;2023-04-04

2. Morphological Transformation between Flat and Tube Structures by Coordinated Motions of Soft Pneumatic Microactuators;Scientific Reports;2019-10-09

3. Design of a MEMS-based motion stage based on a lever mechanism for generating large displacements and forces;Journal of Micromechanics and Microengineering;2016-07-06

4. A MEMSXY-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution;Journal of Micromechanics and Microengineering;2016-01-11

5. Out‐of‐plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications;Micro & Nano Letters;2015-10

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