TMAHW etchants for silicon micromachining-Reference-Cited by-同舟云学术

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TMAHW etchants for silicon micromachining

Published:1991 Issue: Volume: Page:
ISSN:
Container-title:TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers
language:
Short-container-title:

Author:

Schnakenberg U.¹,Benecke W.¹,Lange P.¹

Affiliation:

1. Fraunhofer-Inst. fur Mikrostrukturtech., Berlin, Germany

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx2/505/3940/00149008.pdf?arnumber=149008

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