Modeling of the PolyMUMPs-Based MEMS Sensor for Application in Trace Gas Detection-Reference-Cited by-同舟云学术

Modeling of the PolyMUMPs-Based MEMS Sensor for Application in Trace Gas Detection

Published:2021-12-01 Issue: Volume: Page:
ISSN:
Container-title:2021 International Conference on Intelligent Cybernetics Technology & Applications (ICICyTA)
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Author:

Algamili Abdullah Saleh¹,Khir Mohd Haris¹,Ahmed Abdelaziz Yousif²,Al-Mahdi Osamah Lutf¹,Ba-Hashwan Saeed Salem¹,Alabsi Sami Sultan¹

Affiliation:

1. Universiti Teknologi PETRONAS,Department of Electrical & Electronic Engineering,Bandar Seri Iskandar,Malaysia

2. École de Technologie Supérieure,Département de génie électrique,Montreal,QC,Canada,H3C 1K3

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9688566/9689084/09689204.pdf?arnumber=9689204

Reference20 articles.

1. Polymumps design handbook;carter;MEMSCAP Inc,2005

2. Analytical modelling of the effect of squeeze film damping on the frequency and quality factor of a polymumps resonator;algamili;J Adv Dyn Control Syst (JARDCS),2018

3. Design, Modeling and Simulation of MEMS Resonator for Humidity Sensor Application

4. MEMS-Based Acetone Vapor Sensor for Non-Invasive Screening of Diabetes

5. Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes

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