Fabrication of Efficient Si Fiber Copuler with a Meta Structure of 150 nm Minimum Feature Size
Author:
Affiliation:
1. Yokohama National University,Department of Electrical and Computer Engineering,Yokohama,Japan,240-8501
2. National Institute of Advanced Industrial Science and Technology (AIST),Tsukuba,Japan,305-8569
Funder
Technology Development
Japan Society for the Promotion of Science
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx8/10543257/10543280/10544070.pdf?arnumber=10544070
Reference8 articles.
1. Wide bandwidth and high coupling efficiency Si_3N_4-on-SOI dual-level grating coupler
2. Unidirectional waveguide grating antennas with uniform emission for optical phased arrays
3. Perpendicular Grating Coupler Based on a Blazed Antiback-Reflection Structure
4. Inverse design of near unity efficiency perfectly vertical grating couplers
5. Perfectly vertical surface grating couplers using subwavelength engineering for increased feature sizes
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