High Precision Liquid Level and Leak Detection Based on Capacitive Micromachined Ultrasound Transducer

Author:

Saeidi Nooshin1,Selvam Karman2,Tortato Felipe2,Wiemer Maik1,Kuhn Harald3

Affiliation:

1. University of Technology,System Packaging Fraunhofer ENAS & Chemnitz,Chemnitz,Germany

2. Fraunhofer ENAS,System Packaging,Chemnitz,Germany

3. University of Technology,Fraunhofer ENAS & Chemnitz,Chemnitz,Germany

Publisher

IEEE

Reference13 articles.

1. An Improved Design for 2D Arrays of Capacitive Micromachined Ultrasound Transducers: Modeling, Fabrication, and Characterization

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5. Capacitive micromachined ultrasonic transducer based tilt sensing

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1. A miniaturized sensing system for liquid level and concentration based on piezoelectric micromachined ultrasonic transducers;Sensors and Actuators A: Physical;2024-10

2. A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos Array;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

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