Multi-Mode Silicon Waveguides at Long Infrared Wavelengths
Author:
Affiliation:
1. Fraunhofer ENAS,Technologie Campus 3,Chemnitz,Germany,09126
2. TU Chemnitz,Center for Microtechnologies,Chemnitz,Germany,09126
Funder
Ministry of Education
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9901388/9901406/09901435.pdf?arnumber=9901435
Reference8 articles.
1. Mid-infrared absorption gas sensing using a silicon strip waveguide
2. Performance analysis of different slot waveguide structures for evanescent field based gas sensor applications
3. Tunable Fabry-Perot Filter Using Hybrid Integrated Grating and Slot Microstructures
4. Design of a suspended germanium micro-antenna for efficient fiber-chip coupling in the long-wavelength mid-infrared range
5. Deposited poly-Si as on-demand linewidth compensator for on-chip Fabry–Perot interferometer and vertical linear variable optical filter bandpass and passband manipulation
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1. High precision electrostatic MEMS actuators for in-plane Fabry-Pérot gas sensors;2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2024-04-07
2. Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths;Silicon Photonics XVIII;2023-03-13
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