The Determination of Deposition Parameters for Carbon-Based Materials in an Inductively Coupled Plasma System Using COMSOL-Reference-Cited by-同舟云学术

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The Determination of Deposition Parameters for Carbon-Based Materials in an Inductively Coupled Plasma System Using COMSOL

Published:2022-12 Issue:12 Volume:50 Page:5060-5069
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Fourie Lionel F.¹^ORCID,Square Lynndle C.²^ORCID,Arendse Christopher J.¹

Affiliation:

1. Department of Physics and Astronomy, University of the Western Cape, Bellville, Cape Town, South Africa

2. Center for Space Research, North-West University, Potchefstroom, South Africa

Funder

South African National Research Foundations

North-West University, Center for Space Research for funding the COMSOL license

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx7/27/10007540/09972900.pdf?arnumber=9972900

Reference27 articles.

1. Modeling of dielectric barrier discharge-induced fluid dynamics and heat transfer

2. Development of new method for fluid simulation of capacitively coupled plasma discharge;kim;J Korean Phys Soc,2006

3. Kinetic two-dimensional modeling of inductively coupled plasmas based on a hybrid kinetic approach

4. Scaling laws verification for capacitive rf‐discharge Ar plasma using particle‐in‐cell simulations

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanoscience teaching and research program in South Africa;Frontiers in Nanotechnology;2024-05-30

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