Research on Inductively Coupled Low-Temperature Plasma Spectroscopy Diagnosis-Reference-Cited by-同舟云学术

Research on Inductively Coupled Low-Temperature Plasma Spectroscopy Diagnosis

Published:2022-09 Issue:9 Volume:50 Page:2998-3005
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Shi Xiaomin¹^ORCID,Jiangting Li¹^ORCID,Guo Lixin¹^ORCID,Yue Dong¹^ORCID,Li Fanghao¹

Affiliation:

1. School of Physics and Optoelectronic Engineering, Xidian University, Xi’an, China

Funder

National Natural Science Foundation of China

Foundation for Innovative Research Groups of the National Natural Science Foundation of China

Key Laboratory Foundation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx7/27/9904520/09834285.pdf?arnumber=9834285

Reference28 articles.

1. Spectral diagnosis of electron density of atmospheric pressure plasma torch;dong;J Phys,2011

2. Spectroscopy of Low Temperature Plasma

3. Radio frequency inductively coupled closed plasma generation and spectrum diagnosis experiment;lin;Journal of Air Force Engineering University,2015

4. Physical riview;griem,1962

5. Emission characteristics of argon plasma generated by RF hollow cathode discharge at low pressure;xu;J Vac Sci Technol,2013

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