Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner-Reference-Cited by-同舟云学术

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Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner

Published:2022-08-23 Issue: Volume: Page:
ISSN:
Container-title:2022 IEEE Conference on Control Technology and Applications (CCTA)
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Author:

Khodabakhshi Erfan¹,Nikooienejad Nastaran¹,Maroufi Mohammad¹,Reza Moheimani S. O.¹

Affiliation:

1. Erik Jonsson School of Engineering and Computer Science, The University of Texas at Dallas,Richardson,TX,USA,75080

Funder

University of Texas at Dallas

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9965973/9965785/09966105.pdf?arnumber=9966105

Reference27 articles.

1. A robust loop-shaping approach to fast and accurate nanopositioning

2. Fast Robust Nanopositioning—A Linear-Matrix-Inequalities-Based Optimal Control Approach

3. Convex synthesis of SNI controllers based on frequency-domain data: MEMS nanopositioner example;nikooienejad;IEEE Transactions on Control Systems Technology,2021

4. Stability Robustness of a Feedback Interconnection of Systems With Negative Imaginary Frequency Response

5. Frequency Domain-Based Integral Resonant Control Design for a MEMS Nanopositioner

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atom-resolved imaging with a silicon tip integrated into an on-chip scanning tunneling microscope;Review of Scientific Instruments;2024-03-01

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